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EP 3 830 874 A1

(12)

(43) Date of publication: 09.06.2021 Bulletin 2021/23 (21) Application number: 19857740.5 (22) Date of filing: 05.09.2019

(51) International Patent Classification (IPC):  H01L 27/15(2006.01) H01L 33/52(2010.01) H01L 33/00(2010.01) H01L 33/58(2010.01) H01L 33/44(2010.01) (86) International application number: PCT/KR2019/011490 (87) International publication number: WO 2020/050652 (12.03.2020 Gazette 2020/11)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 05.09.2018 KR 20180106126 28.08.2019 KR 20190106121 (71) Applicant: Samsung Electronics Co., Ltd. Suwon-si 16677 (KR)	(72) Inventors: HAN, Seung Ryong Suwon-si Gyeonggi-do 16677 (KR) KIM, Hyun Sun Suwon-si Gyeonggi-do 16677 (KR) PARK, Sang Moo Suwon-si Gyeonggi-do 16677 (KR) (74) Representative: Walaski, Jan Filip et al Venner Shipley LLP 200 Aldersgate London EC1A 4HD London EC1A 4HD (GB)