(19)
(11) EP 3 847 301 A2

(12)

(88) Date of publication A3:
25.06.2020

(43) Date of publication:
14.07.2021 Bulletin 2021/28

(21) Application number: 19883888.0

(22) Date of filing: 04.09.2019
(51) International Patent Classification (IPC): 
D06B 1/02(2006.01)
D06B 19/00(2006.01)
(86) International application number:
PCT/US2019/049556
(87) International publication number:
WO 2020/101793 (22.05.2020 Gazette 2020/21)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 04.09.2018 US 201862726905 P

(71) Applicant: Surfx Technologies LLC
Redondo Beach, CA 90278 (US)

(72) Inventors:
  • WILLIAMS, Thomas Scott
    Los Angeles, CA 90025 (US)
  • CHENG, Siu Fai
    Culver City, CA 90230 (US)
  • HICKS, Robert F.
    Los Angeles, CA 90024 (US)

(74) Representative: FRKelly 
27 Clyde Road
Dublin D04 F838
Dublin D04 F838 (IE)

   


(54) DEVICE AND METHOD FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS