(19)
(11) EP 3 853 886 A1

(12)

(43) Date of publication:
28.07.2021 Bulletin 2021/30

(21) Application number: 19877125.5

(22) Date of filing: 02.10.2019
(51) International Patent Classification (IPC): 
H01L 21/66(2006.01)
G06K 9/00(2006.01)
H01L 21/70(2006.01)
H01L 21/027(2006.01)
(86) International application number:
PCT/IL2019/051074
(87) International publication number:
WO 2020/084607 (30.04.2020 Gazette 2020/18)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 23.10.2018 US 201862749131 P

(71) Applicant: Orbotech Ltd.
8110101 Yavne (IL)

(72) Inventors:
  • ORON, Ram
    7406483 Nes Ziona (IL)
  • BURDINOV, Michael
    8427205 Beer Sheva (IL)
  • GOSHEN, Elad
    8480318 Beer Sheva (IL)
  • KAMINSKY, Ronald F.
    4435113 Kfar Saba (IL)
  • RAVEH, Gonen
    7986000 Moshav Timorim (IL)

(74) Representative: FRKelly 
27 Clyde Road
Dublin D04 F838
Dublin D04 F838 (IE)

   


(54) ADAPTIVE ROUTING FOR CORRECTING DIE PLACEMENT ERRORS