(19)

(11)

EP 3 853 886 A1

(12)

(43) Date of publication: 28.07.2021 Bulletin 2021/30 (21) Application number: 19877125.5 (22) Date of filing: 02.10.2019

(51) International Patent Classification (IPC):  H01L 21/66(2006.01) G06K 9/00(2006.01) H01L 21/70(2006.01) H01L 21/027(2006.01) (86) International application number: PCT/IL2019/051074 (87) International publication number: WO 2020/084607 (30.04.2020 Gazette 2020/18)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 23.10.2018 US 201862749131 P (71) Applicant: Orbotech Ltd. 8110101 Yavne (IL)	(72) Inventors: ORON, Ram 7406483 Nes Ziona (IL) BURDINOV, Michael 8427205 Beer Sheva (IL) GOSHEN, Elad 8480318 Beer Sheva (IL) KAMINSKY, Ronald F. 4435113 Kfar Saba (IL) RAVEH, Gonen 7986000 Moshav Timorim (IL) (74) Representative: FRKelly  27 Clyde Road Dublin D04 F838 Dublin D04 F838 (IE)