(19)
(11) EP 3 864 690 A1

(12)

(43) Date of publication:
18.08.2021 Bulletin 2021/33

(21) Application number: 19802329.3

(22) Date of filing: 09.10.2019
(51) International Patent Classification (IPC): 
H01L 21/67(2006.01)
H01L 21/683(2006.01)
(86) International application number:
PCT/US2019/055395
(87) International publication number:
WO 2020/076949 (16.04.2020 Gazette 2020/16)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 10.10.2018 US 201862743936 P

(71) Applicant: Nordson Corporation
Westlake, OH 44145-1119 (US)

(72) Inventors:
  • LILLEY, David, T.
    Aylesbury HP19 8RY (GB)
  • BUGG, Martin
    Aylesbury HP19 8RY (GB)

(74) Representative: Dundas, Gavin Turner 
Reddie & Grose LLP The White Chapel Building 10 Whitechapel High Street
London E1 8QS
London E1 8QS (GB)

   


(54) VACUUM CLAMPING APPARATUS AND METHOD