(19)
(11) EP 3 867 528 A1

(12)

(43) Date of publication:
25.08.2021 Bulletin 2021/34

(21) Application number: 19787367.2

(22) Date of filing: 03.10.2019
(51) International Patent Classification (IPC): 
F04B 37/02(2006.01)
F04B 37/14(2006.01)
F04B 19/00(2006.01)
F04B 37/08(2006.01)
F04B 41/06(2006.01)
(86) International application number:
PCT/GB2019/052785
(87) International publication number:
WO 2020/079396 (23.04.2020 Gazette 2020/17)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 18.10.2018 GB 201816978

(71) Applicant: Edwards Limited
Burgess Hill, Sussex RH15 9TW (GB)

(72) Inventor:
  • CHEW, Andrew David
    Burgess Hill Sussex RH15 9TW (GB)

(74) Representative: Totman, Clare Elizabeth 
Edwards Limited Innovation Drive
GB-Burgess Hill, West Sussex RH15 9TW
GB-Burgess Hill, West Sussex RH15 9TW (GB)

   


(54) NON-MECHANICAL VACUUM PUMPING SYSTEM AND ANALYTICAL INSTRUMENT