| (84) |
Designated Contracting States: |
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DE |
| (30) |
Priority: |
16.10.2018 JP 2018194807
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| (43) |
Date of publication of application: |
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25.08.2021 Bulletin 2021/34 |
| (73) |
Proprietor: SHIN-ETSU CHEMICAL CO., LTD. |
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Tokyo 100-0004 (JP) |
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| (72) |
Inventors: |
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- SHUDO, Shigeki
Annaka-shi, Gunma 379-0224 (JP)
- IINO, Mikio
Annaka-shi, Gunma 379-0224 (JP)
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| (74) |
Representative: Mewburn Ellis LLP |
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Aurora Building
Counterslip Bristol BS1 6BX Bristol BS1 6BX (GB) |
| (56) |
References cited: :
WO-A1-2018/055896 JP-A- H0 741 679 JP-A- 2005 325 211 JP-A- 2008 291 124 JP-A- 2018 048 214
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WO-A1-2018/173945 JP-A- H07 331 079 JP-A- 2008 101 056 JP-A- 2016 084 385 JP-A- 2019 189 723
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