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(11)

EP 3 871 277 A1

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(43) Date of publication: 01.09.2021 Bulletin 2021/35 (21) Application number: 19794926.6 (22) Date of filing: 21.10.2019

(51) International Patent Classification (IPC):  H01L 39/24(2006.01) H01L 39/12(2006.01) (86) International application number: PCT/EP2019/078582 (87) International publication number: WO 2020/083840 (30.04.2020 Gazette 2020/18)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 22.10.2018 US 201862766485 P 19.06.2019 GB 201908788 (71) Applicant: Cambridge Enterprise Limited Cambridge, Cambridgeshire CB2 1TN (GB)

(72) Inventors: NAMBURI, Devendra Kumar Cambridge Cambridgeshire CB2 1PZ (GB) PALMER, Kysen G Cambridge Cambridgeshire CB2 1PZ (GB) LAU, Wayne Cambridge Cambridgeshire CB2 1PZ (GB) SHI, Yunhua Cambridge Cambridgeshire CB2 1PZ (GB) DENNIS, Anthony Cambridge Cambridgeshire CB2 1PZ (GB) DURRELL, John Hay Cambridge Cambridgeshire CB2 1PZ (GB) CARDWELL, David Cambridge Cambridgeshire CB2 1PZ (GB) (74) Representative: Mewburn Ellis LLP  Aurora Building Counterslip Bristol BS1 6BX Bristol BS1 6BX (GB)