(19)
(11) EP 3 871 473 A1

(12)

(43) Date of publication:
01.09.2021 Bulletin 2021/35

(21) Application number: 19806069.1

(22) Date of filing: 24.10.2019
(51) International Patent Classification (IPC): 
H05G 2/00(2006.01)
(86) International application number:
PCT/US2019/057944
(87) International publication number:
WO 2020/086901 (30.04.2020 Gazette 2020/18)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 26.10.2018 US 201862751267 P

(71) Applicant: ASML Netherlands B.V.
5500 AH Veldhoven (NL)

(72) Inventors:
  • BROWN, Daniel John William
    San Diego, California 92127 (US)
  • RAFAC, Robert Jay
    San Diego, California 92127 (US)
  • TAO, Yezheng
    San Diego, California 92127 (US)
  • FOMENKOV, Igor Vladimirovich
    San Diego, California 92127 (US)
  • STEWART, John, Tom, IV
    San Diego, California 92127 (US)

(74) Representative: ASML Netherlands B.V. 
Corporate Intellectual Property P.O. Box 324
5500 AH Veldhoven
5500 AH Veldhoven (NL)

   


(54) MONITORING LIGHT EMISSIONS