(84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
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Designated Validation States: |
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KH MA MD TN |
(30) |
Priority: |
26.10.2018 US 201862751267 P
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(71) |
Applicant: ASML Netherlands B.V. |
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5500 AH Veldhoven (NL) |
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(72) |
Inventors: |
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- BROWN, Daniel John William
San Diego, California 92127 (US)
- RAFAC, Robert Jay
San Diego, California 92127 (US)
- TAO, Yezheng
San Diego, California 92127 (US)
- FOMENKOV, Igor Vladimirovich
San Diego, California 92127 (US)
- STEWART, John, Tom, IV
San Diego, California 92127 (US)
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(74) |
Representative: ASML Netherlands B.V. |
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Corporate Intellectual Property
P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL) |
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