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EP 3 881 349 A1

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(43) Date of publication: 22.09.2021 Bulletin 2021/38 (21) Application number: 19884016.7 (22) Date of filing: 25.09.2019

(51) International Patent Classification (IPC):  H01L 21/285(2006.01) H01L 21/324(2006.01) C23C 16/42(2006.01) H01L 21/311(2006.01) C23C 16/46(2006.01) C23C 16/455(2006.01) (52) Cooperative Patent Classification (CPC): C23C 16/42; C23C 16/455; C23C 16/46; H01L 21/285; H01L 21/311; H01L 21/324 (86) International application number: PCT/US2019/052967 (87) International publication number: WO 2020/101806 (22.05.2020 Gazette 2020/21)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 13.11.2018 US 201816189429 (71) Applicants: Applied Materials, Inc. Santa Clara, California 95054 (US) The Regents of the University of California Oakland, CA 94607 (US)

(72) Inventors: HUNG, Raymond Palo Alto, California 94303 (US) KIM, Namsung Sunnyvale, California 94085 (US) NEMANI, Srinivas D. Sunnyvale, California 94085 (US) YIEH, Ellie Y. San Jose, California 95138 (US) CHOI, Jong San Diego, California 92092 (US) AHLES, Christopher San Diego, California 92122 (US) KUMMEL, Andrew San Diego, California 92101 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)