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(11)

EP 3 884 289 A1

(12)

(43) Date of publication: 29.09.2021 Bulletin 2021/39 (21) Application number: 19828439.0 (22) Date of filing: 04.12.2019

(51) International Patent Classification (IPC):  G01R 33/035(2006.01) H01L 27/18(2006.01) H01L 23/00(2006.01) G01R 33/12(2006.01) (52) Cooperative Patent Classification (CPC): G01R 33/0354; G01R 33/1246; G01R 31/71; H01L 24/81 (86) International application number: PCT/US2019/064526 (87) International publication number: WO 2020/146062 (16.07.2020 Gazette 2020/29)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 07.01.2019 US 201916241661 (71) Applicant: Northrop Grumman Systems Corporation Falls Church, VA 22042-4511 (US)

(72) Inventors: GRANINGER, Aurelius L. Sykesville, Maryland 21784 (US) STRAND, Joel D. Ellicott City, Maryland 21042 (US) STOUTIMORE, Micah John Atman Kensington, Maryland 20895 (US) KEANE, Zachary Kyle Baltimore, Maryland 21217 (US) HARTMAN, Jeffrey David 1607 Woodruff Court, Maryland 21144 (US) HACKLEY, Justin C. Catonsville, Maryland 21228 (US) (74) Representative: Iqbal, Md Mash-Hud  Marks & Clerk LLP 62-68 Hills Road Cambridge CB2 1LA Cambridge CB2 1LA (GB)