(84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
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Designated Validation States: |
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KH MA MD TN |
(71) |
Applicant: Heraeus Materials Singapore Pte. Ltd. |
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569881 Singapore (SG) |
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(72) |
Inventors: |
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- Zhen, Yun Liu
555852 Singapore (SG)
- Muhammad Shahzali Bin Jolani
555852 Singapore (SG)
- Yang, Yu
555852 Singapore (SG)
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(74) |
Representative: Herzog IP Patentanwalts GmbH |
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Steinstraße 16-18 40212 Düsseldorf 40212 Düsseldorf (DE) |
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