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(11)

EP 3 888 120 A1

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(43) Date of publication: 06.10.2021 Bulletin 2021/40 (21) Application number: 19890099.5 (22) Date of filing: 30.09.2019

(51) International Patent Classification (IPC):  H01L 21/768(2006.01) H01L 21/3065(2006.01) H01L 21/02(2006.01) H01L 21/306(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/76885; H01L 21/32134; H01L 21/32131; H01L 21/02244; H01L 21/32135; H01L 23/53257; H01L 21/32136 (86) International application number: PCT/US2019/053778 (87) International publication number: WO 2020/112237 (04.06.2020 Gazette 2020/23)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 30.11.2018 US 201862773999 P (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: NALAMASU, Omkaram Santa Clara, California 95054 (US) GODET, Ludovic Santa Clara, California 95054 (US) WANG, Yifei Santa Clara, California 95054 (US) FU, Jinxin Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)