| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
31.03.2020 JP 2020064381
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| (43) |
Date of publication of application: |
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06.10.2021 Bulletin 2021/40 |
| (60) |
Divisional application: |
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24170018.6 / 4389202 |
| (73) |
Proprietor: Hitachi High-Tech Corporation |
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Minato-ku
Tokyo 105-6409 (JP) |
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| (72) |
Inventors: |
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- KANEKO, Shuji
Tokyo 100-8280 (JP)
- TAKAHASHI, Kunio
Tokyo 100-8280 (JP)
|
| (74) |
Representative: MERH-IP Matias Erny Reichl Hoffmann
Patentanwälte PartG mbB |
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Paul-Heyse-Strasse 29 80336 München 80336 München (DE) |
| (56) |
References cited: :
EP-A1- 1 419 799 US-A1- 2011 210 261
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JP-A- 2015 100 455
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