(19)
(11) EP 3 889 319 A8

(12) CORRECTED EUROPEAN PATENT APPLICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 A1)

(48) Corrigendum issued on:
17.11.2021 Bulletin 2021/46

(43) Date of publication:
06.10.2021 Bulletin 2021/40

(21) Application number: 20167549.3

(22) Date of filing: 01.04.2020
(51) International Patent Classification (IPC): 
C23C 26/00(2006.01)
C23C 28/00(2006.01)
C03C 17/34(2006.01)
H01L 33/46(2010.01)
 C23C 26/02(2006.01)
C23C 28/04(2006.01)
H01L 33/44(2010.01)
(52) Cooperative Patent Classification (CPC):
C23C 28/042; C23C 26/00; C23C 26/02; C03C 17/3417; C23C 28/04; C23C 28/00; C03C 2217/734
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(71) Applicant: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO
2595 DA 's-Gravenhage (NL)

(72) Inventor:
  • HENDRIKS, Rob Jacob
    2595 DA 's-Gravenhage (NL)

(74) Representative: V.O. 
P.O. Box 87930
2508 DH Den Haag
2508 DH Den Haag (NL)


(56) References cited: : 
   
       


    (54) CONTROLLED DEPOSITION OF A FUNCTIONAL MATERIAL ONTO A TARGET SURFACE


    (57) A plate (1) is provided herein, comprising functional material (2) to be deposited onto a target surface (51) using monochromatic photon radiation (R3) having a wavelength (λR3). The plate comprises a substrate (10) with a first surface (11) to be directed towards the target surface and with a second surface (12) to receive the monochromatic photon radiation. The first surface (11) is patterned with one or more recessed areas (111) that have a dielectric coating (4) and that are filled with the functional material. The dielectric coating (4) comprises a sequence of dielectric coating layers (41, 42, 43) alternating in refractive index. The dielectric coating (4) therewith has a relatively high reflectivity for said monochromatic radiation (R3) incident perpendicular to the dielectric coating (4) in comparison to a reflectivity for said monochromatic radiation (R3) incident at an angle of 45 degrees to the dielectric coating (4). Therewith shear forces are mitigated without requiring a high alignment accuracy.
    The present application further provides a deposition device comprising the plate and a method involving the plate.