(19)
(11) EP 3 891 774 A1

(12)

(43) Date of publication:
13.10.2021 Bulletin 2021/41

(21) Application number: 19821307.6

(22) Date of filing: 06.12.2019
(51) International Patent Classification (IPC): 
H01J 37/285(2006.01)
 G01N 23/227(2018.01)
(52) Cooperative Patent Classification (CPC):
H01J 37/285; G01N 23/2273; G01N 2223/34; H01J 2237/2605; H01J 2237/20235; G01N 2223/085; H01J 2237/2855; H01J 2237/188; H01J 2237/182
(86) International application number:
PCT/SE2019/051242
(87) International publication number:
WO 2020/117124 (11.06.2020 Gazette 2020/24)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 07.12.2018 SE 1851528

(71) Applicant: Scienta Omicron AB
750 15 Uppsala (SE)

(72) Inventors:
  • AMANN, Peter
    Åkersberga 184 94 (SE)
  • NILSSON, Anders
    117 57 Stockholm (SE)

(74) Representative: Zacco Sweden AB 
P.O. Box 5581
114 85 Stockholm
114 85 Stockholm (SE)

   


(54) METHOD AND ARRANGEMENT FOR DISTANCE CONTROL BETWEEN A SAMPLE AND AN APERTURE