(19)

(11)

EP 3 891 776 A2

(12)

(88) Date of publication A3: 23.07.2020 (43) Date of publication: 13.10.2021 Bulletin 2021/41 (21) Application number: 19821306.8 (22) Date of filing: 06.12.2019

(51) International Patent Classification (IPC):  H01J 49/00(2006.01) G01N 23/227(2018.01) H01J 37/285(2006.01) (52) Cooperative Patent Classification (CPC): H01J 2237/2855; H01J 37/285; H01J 49/484; H01J 49/067; H01J 2237/2605; H01J 2237/006; H01J 2237/188 (86) International application number: PCT/SE2019/051240 (87) International publication number: WO 2020/117122 (11.06.2020 Gazette 2020/24)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 07.12.2018 SE 1851526 09.04.2019 SE 1950444 (71) Applicant: Scienta Omicron AB 750 15 Uppsala (SE)	(72) Inventors: AMANN, Peter 184 94 Åkersberga (SE) NILSSON, Anders 117 57 Stockholm (SE) (74) Representative: Zacco Sweden AB  P.O. Box 5581 114 85 Stockholm 114 85 Stockholm (SE)