(19)

(11)

EP 3 895 206 A1

(12)

(43) Date of publication: 20.10.2021 Bulletin 2021/42 (21) Application number: 19813335.7 (22) Date of filing: 05.12.2019

(51) International Patent Classification (IPC):  H01L 21/20(2006.01) H01S 5/00(2006.01) H01L 33/00(2010.01) (52) Cooperative Patent Classification (CPC): H01L 21/0245; H01L 21/02675; H01L 21/02535; H01L 21/02667; H01L 21/02532; H01L 21/02381; H01S 5/3027; H01L 21/02452; H01L 33/34; H01L 33/0054; H01L 33/343; H01S 5/2068 (86) International application number: PCT/EP2019/083815 (87) International publication number: WO 2020/120279 (18.06.2020 Gazette 2020/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 14.12.2018 EP 18212804 (71) Applicant: IRIS Industries SA 2024 Saint-Aubin-Sauges (CH)	(72) Inventor: MEYLAN, Claude 2024 Saint-Aubin-Sauges (CH) (74) Representative: Bovard SA Neuchâtel  Rue des Noyers 11 2000 Neuchâtel 2000 Neuchâtel (CH)