(19)
(11) EP 3 899 420 A1

(12)

(43) Date of publication:
27.10.2021 Bulletin 2021/43

(21) Application number: 19823930.3

(22) Date of filing: 29.11.2019
(51) International Patent Classification (IPC): 
G01B 9/02(2006.01)
G01M 11/00(2006.01)
G01B 11/16(2006.01)
G01N 21/95(2006.01)
G01N 21/88(2006.01)
G01B 11/24(2006.01)
(52) Cooperative Patent Classification (CPC):
G01B 2290/70; G01B 9/02003; G01N 2021/9511; G01M 11/0271; G01N 21/95; G01M 11/005; G01B 9/02007; G01B 11/2441; G01N 21/45; G01B 11/162; G01B 9/02038; G01B 9/02057
(86) International application number:
PCT/GB2019/053395
(87) International publication number:
WO 2020/128423 (25.06.2020 Gazette 2020/26)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 17.12.2018 GB 201820515

(71) Applicant: Compass Optics Limited
Menai Bridge Gwynedd LL59 5NG (GB)

(72) Inventor:
  • MITCHELL, John
    Gwynedd LL59 5NG (GB)

(74) Representative: Scintilla Intellectual Property Ltd 
The Centrum Building 38 Queen Street
Glasgow G1 3DX
Glasgow G1 3DX (GB)

   


(54) FULL-FIELD HETERODYNE INTERFEROMETER FOR INSPECTING AN OPTICAL SURFACE