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(11)

EP 3 909 082 A1

(12)

(43) Date of publication: 17.11.2021 Bulletin 2021/46 (21) Application number: 19704304.5 (22) Date of filing: 07.02.2019

(51) International Patent Classification (IPC):  H01L 29/417(2006.01) H01L 29/737(2006.01) H01L 23/532(2006.01) H01L 29/423(2006.01) H01L 29/16(2006.01) H01L 23/00(2006.01) (52) Cooperative Patent Classification (CPC): H01L 2224/85493; H01L 2924/19042; H01L 28/10; H01L 2924/19041; H01L 29/413; H01L 29/41708; H01L 29/0684; H01L 23/5227; H01L 2924/19103; H01L 29/735; H01L 23/5223; H01L 29/7371; H01L 24/85; H01L 2224/48227; H01L 2224/48245; H01L 2224/81493; H01L 28/40; H01L 2924/15311; H01L 29/0817; H01L 2224/13144; H01L 24/48; H01L 2224/16145; H01L 2224/131; H01L 23/5222; H01L 2224/13147; H01L 23/49888; H01L 24/16; H01L 23/49822; H01L 24/13; H01L 23/53276; H01L 23/53285; H01L 24/81; H01L 2224/81192; H01L 2224/16227   C-Sets: H01L 2224/131, H01L 2924/014, H01L 2924/00014; H01L 2224/13147, H01L 2924/00014; H01L 2224/13144, H01L 2924/00014; (86) International application number: PCT/EP2019/053054 (87) International publication number: WO 2020/160779 (13.08.2020 Gazette 2020/33)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (71) Applicant: Huawei Technologies Co., Ltd. Shenzhen, Guangdong 518129 (CN)	(72) Inventors: SLEZAK, Yaron 80992 Munich (DE) MALOBANI, Itzik 80992 Munich (DE) EL BAHAR, Roni 80992 Munich (DE) (74) Representative: Thun, Clemens  Mitscherlich PartmbB Patent- und Rechtsanwälte Sonnenstraße 33 80331 München 80331 München (DE)