(19)

(11)

EP 3 914 750 A1

(12)

(43) Date of publication: 01.12.2021 Bulletin 2021/48 (21) Application number: 19912156.7 (22) Date of filing: 18.11.2019

(51) International Patent Classification (IPC):  C23C 16/455(2006.01) C23C 16/02(2006.01) C23C 16/34(2006.01) C23C 16/56(2006.01) C23C 16/40(2006.01) C23C 16/448(2006.01) (52) Cooperative Patent Classification (CPC): C23C 16/403; C23C 16/45555; C23C 16/0245; C23C 16/54; C23C 16/042 (86) International application number: PCT/US2019/061970 (87) International publication number: WO 2020/154023 (30.07.2020 Gazette 2020/31)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 25.01.2019 IN 201941003143 (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: BAJAJ, Geetika Santa Clara, California 95054 (US) THAKARE, Darshan Santa Clara, California 95054 (US) GORADIA, Prerna Sonthalia Santa Clara, California 95054 (US) GANAPATHIAPPAN, Sivapackia Santa Clara, California 95054 (US) BRITZ, David Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)