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(11)

EP 3 921 460 A1

(12)

(43) Date of publication: 15.12.2021 Bulletin 2021/50 (21) Application number: 20702499.3 (22) Date of filing: 06.02.2020

(51) International Patent Classification (IPC):  C25D 3/56(2006.01) C25D 5/50(2006.01) H01L 21/768(2006.01) C25D 5/34(2006.01) C25D 7/12(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/76877; H01L 23/53238; H01L 21/76883; H01L 21/2885; H01L 21/76867; C25D 7/123; C25D 5/18; C25D 5/50; C25D 3/58; C25D 3/562; H01L 23/53209 (86) International application number: PCT/EP2020/053018 (87) International publication number: WO 2020/161256 (13.08.2020 Gazette 2020/33)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 08.02.2019 FR 1901264 14.01.2020 FR 2000297 (71) Applicant: Aveni 91300 Massy (FR)	(72) Inventors: MEVELLEC, Vincent 92100 BOULOGNE (FR) CAILLARD, Louis 94230 CACHAN (FR) THIAM, Mikaïlou 60200 COMPIEGNE (FR) SUHR, Dominique 92290 CHATENAY - MALABRY (FR) (74) Representative: Cabinet Beau de Loménie  158, rue de l'Université 75340 Paris Cedex 07 75340 Paris Cedex 07 (FR)