(19)
(11) EP 3 921 654 A1

(12)

(43) Date of publication:
15.12.2021 Bulletin 2021/50

(21) Application number: 20704100.5

(22) Date of filing: 03.02.2020
(51) International Patent Classification (IPC): 
G01Q 30/20(2010.01)
G01N 29/06(2006.01)
 G01Q 60/32(2010.01)
(52) Cooperative Patent Classification (CPC):
G01N 29/0681; G01N 2291/0427; G01Q 30/20; G01Q 60/32
(86) International application number:
PCT/NL2020/050056
(87) International publication number:
WO 2020/162744 (13.08.2020 Gazette 2020/33)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 05.02.2019 NL 2022516

(71) Applicant: Nearfield Instruments B.V.
3047 AT Rotterdam (NL)

(72) Inventor:
  • SADEGHIAN MARNANI, Hamed
    3047 AT Rotterdam (NL)

(74) Representative: V.O. 
P.O. Box 87930
2508 DH Den Haag
2508 DH Den Haag (NL)

   


(54) METHOD OF AND ARRANGEMENT FOR MAPPING STRUCTURAL FEATURES ON A SURFACE OF A SAMPLE BY SCANNING PROBE MICROSCOPY