(19)

(11)

EP 3 927 864 A2

(12)

(88) Date of publication A3: 26.11.2020 (43) Date of publication: 29.12.2021 Bulletin 2021/52 (21) Application number: 20717685.0 (22) Date of filing: 15.04.2020

(51) International Patent Classification (IPC):  C23C 14/28(2006.01) C23C 14/54(2006.01) (52) Cooperative Patent Classification (CPC): C23C 14/28; C23C 14/543 (86) International application number: PCT/EP2020/060550 (87) International publication number: WO 2020/212398 (22.10.2020 Gazette 2020/43)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 16.04.2019 EP 19169438 (71) Applicant: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. 80539 München (DE)	(72) Inventor: BRAUN, Wolfgang 74321 Bietigheim-Bissingen (DE) (74) Representative: Manitz Finsterwald Patent- und Rechtsanwaltspartnerschaft mbB  Martin-Greif-Strasse 1 80336 München 80336 München (DE)