(19)
(11) EP 3 929 968 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
15.02.2023 Bulletin 2023/07

(45) Mention of the grant of the patent:
11.01.2023 Bulletin 2023/02

(21) Application number: 21179639.6

(22) Date of filing: 15.06.2021
(51) International Patent Classification (IPC): 
H01L 21/67(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 21/6715

(54)

WET PROCESS MODULE AND METHOD OF OPERATION

NASSVERFAHRENSMODUL UND VERFAHREN ZUM BETRIEB

MODULE DE TRAITEMENT PAR VOIE HUMIDE ET SON PROCÉDÉ DE FONCTIONNEMENT

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 25.06.2020 NL 2025916

(43) Date of publication of application:
29.12.2021 Bulletin 2021/52

(73) Proprietor: SUSS MicroTec Solutions GmbH & Co. KG
75447 Sternenfels (DE)

(72) Inventors:
  • BRAUN, Michael
    85748 Garching (DE)
  • SCHUTZBACH, Simon
    85748 Garching (DE)

(74) Representative: Prinz & Partner mbB 
Patent- und Rechtsanwälte Rundfunkplatz 2
80335 München
80335 München (DE)


(56) References cited: : 
US-A1- 2005 074 983
US-A1- 2009 302 024
US-B1- 6 332 724
 US-A1- 2006 124 060
US-A1- 2016 189 988
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).