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(11)

EP 3 935 662 A1

(12)

(43) Date of publication: 12.01.2022 Bulletin 2022/02 (21) Application number: 19918773.3 (22) Date of filing: 08.03.2019

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) H01L 23/48(2006.01) H01L 23/495(2006.01) H01L 21/56(2006.01) H05K 3/32(2006.01) H01L 21/00(2006.01) H01L 23/488(2006.01) H01L 21/48(2006.01) H05K 3/30(2006.01) H05K 3/34(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/4842; H01L 21/561; H01L 21/78; H01L 23/3107; H01L 23/49541; H01L 23/49562; H01L 23/49582; H01L 24/40; H01L 24/41; H01L 24/48; H01L 24/49; H01L 24/97; H01L 2224/0603; H01L 2224/32245; H01L 2224/40247; H01L 2224/41111; H01L 2224/48247; H01L 2224/48465; H01L 2224/49111; H01L 2224/73265; H01L 2224/97; H01L 2924/181   C-Sets: H01L 2924/181, H01L 2924/00012; H01L 2224/97, H01L 2224/85; H01L 2224/97, H01L 2224/83; H01L 2224/97, H01L 2224/84; H01L 2224/73265, H01L 2224/32245, H01L 2224/48247, H01L 2924/00012; (86) International application number: PCT/US2019/021272 (87) International publication number: WO 2020/185192 (17.09.2020 Gazette 2020/38)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (71) Applicant: Siliconix Incorporated San Jose, California 95134 (US)	(72) Inventor: LIN, Barry Kaohsiung City, 830 (TW) (74) Representative: Manitz Finsterwald Patent- und Rechtsanwaltspartnerschaft mbB  Martin-Greif-Strasse 1 80336 München 80336 München (DE)