(19)
(11) EP 3 942 596 A1

(12)

(43) Date of publication:
26.01.2022 Bulletin 2022/04

(21) Application number: 20773316.3

(22) Date of filing: 23.02.2020
(51) International Patent Classification (IPC): 
H01L 21/02(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 21/02337; H01L 21/67253; C23C 8/10; C23C 16/24; H01L 21/02238; H01L 21/67115; H01L 21/67063; C23C 8/24; H01L 21/67248; H01L 21/02255; H01L 21/02326; C23C 16/345; C23C 8/34
(86) International application number:
PCT/US2020/019394
(87) International publication number:
WO 2020/190449 (24.09.2020 Gazette 2020/39)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 20.03.2019 US 201962821298 P

(71) Applicant: Applied Materials, Inc.
Santa Clara, California 95054 (US)

(72) Inventors:
  • LESCHKIES, Kurtis
    Santa Clara, California 95054 (US)
  • SWENBERG, Johanes F.
    Santa Clara, California 95054 (US)
  • COLOMBEAU, Benjamin
    Santa Clara, California 95054 (US)
  • VERHAVERBEKE, Steven
    Santa Clara, California 95054 (US)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
Postfach 330 920
80069 München
80069 München (DE)

   


(54) METHOD OF GROWING THICK OXIDE FILMS AT LOW TEMPERATURE OF THERMAL OXIDE QUALITY