(19)

(11)

EP 3 947 401 A1

(12)

(43) Date of publication: 09.02.2022 Bulletin 2022/06 (21) Application number: 20719941.5 (22) Date of filing: 27.03.2020

(51) International Patent Classification (IPC):  C07F 7/08(2006.01) H01L 51/50(2006.01) H01L 51/00(2006.01) (52) Cooperative Patent Classification (CPC): C07F 7/0812; Y02E 10/549; H01L 51/0071; H01L 51/5012 (86) International application number: PCT/EP2020/058676 (87) International publication number: WO 2020/201070 (08.10.2020 Gazette 2020/41)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 01.04.2019 EP 19166493 (71) Applicant: cynora GmbH 76646 Bruchsal (DE)	(72) Inventors: DIGENNARO, Angela 69120 Heidelberg (DE) VELLAIYAPPAN, Arun Pandian 76227 Karlsruhe (DE) THIRION, Damien 76689 Karlsdorf-Neuthard (DE) WEIDLICH, Sabine 60439 Frankfurt (DE) (74) Representative: Hoppe, Georg Johannes  Darani Anwaltskanzlei Beuckestrasse 20 14163 Berlin 14163 Berlin (DE)