(19)

(11)

EP 3 949 692 A1

(12)

(43) Date of publication: 09.02.2022 Bulletin 2022/06 (21) Application number: 20723950.0 (22) Date of filing: 31.03.2020

(51) International Patent Classification (IPC):  H05G 2/00(2006.01) (52) Cooperative Patent Classification (CPC): H05G 2/006; H05G 2/008 (86) International application number: PCT/US2020/025998 (87) International publication number: WO 2020/205883 (08.10.2020 Gazette 2020/41)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 01.04.2019 US 201962827521 P (71) Applicant: ASML Netherlands B.V. 5500 AH Veldhoven (NL)

(72) Inventors: WANG, Haining San Diego, California 92127 (US) DRIESSEN, Theodorus Wilhelmus San Diego, California 92127 (US) SCHAFGANS, Alexander Anthony San Diego, California 92127 (US) TREES, Dietmar Uwe Herbert San Diego, California 92127 (US) BROWN, Daniel John William San Diego, California 92127 (US) RAFAC, Robert Jay San Diego, California 92127 (US) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)