(19)

(11)

EP 3 956 825 A1

(12)

(43) Date of publication: 23.02.2022 Bulletin 2022/08 (21) Application number: 20719425.9 (22) Date of filing: 15.04.2020

(51) International Patent Classification (IPC):  G06N 10/00(2022.01) H01L 39/22(2006.01) B82Y 10/00(2011.01) (52) Cooperative Patent Classification (CPC): H01L 27/18; H01L 39/24; G06N 10/00; B82Y 10/00; H01L 39/025; H01L 29/66977 (86) International application number: PCT/EP2020/060612 (87) International publication number: WO 2020/212437 (22.10.2020 Gazette 2020/43)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 19.04.2019 US 201916389001 19.04.2019 US 201916389033 (71) Applicant: International Business Machines Corporation Armonk, New York 10504 (US)	(72) Inventors: SHAO, Dongbing Yorktown Heights, New York, 10598 (US) BRINK, Markus Yorktown Heights, New York, 10598 (US) SOLGUN, Firat Yorktown Heights, New York, 10598 (US) HERTZBERG, Jared, Barney Yorktown Heights, New York, 10598 (US) (74) Representative: RPK Patentanwälte Reinhardt, Pohlmann und Kaufmann Partnerschaft mbB  Gaisburgstrasse 21 70182 Stuttgart 70182 Stuttgart (DE)