(19) |
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(11) |
EP 3 961 671 A8 |
(12) |
CORRECTED EUROPEAN PATENT APPLICATION |
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Note: Bibliography reflects the latest situation |
(15) |
Correction information: |
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Corrected version no 1 (W1 A1) |
(48) |
Corrigendum issued on: |
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13.04.2022 Bulletin 2022/15 |
(43) |
Date of publication: |
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02.03.2022 Bulletin 2022/09 |
(22) |
Date of filing: 03.08.2021 |
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(51) |
International Patent Classification (IPC):
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(84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
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Designated Validation States: |
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KH MA MD TN |
(30) |
Priority: |
14.08.2020 JP 2020136922
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(71) |
Applicant: Jeol Ltd. |
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Akishima-shi, Tokyo 196-8558 (JP) |
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(72) |
Inventors: |
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- KATAOKA, Shogo
Tokyo, 196-8558 (JP)
- MINO, Tatsuro
Tokyo, 196-8558 (JP)
- TODOROKI, Koji
Tokyo, 196-8558 (JP)
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(74) |
Representative: Boult Wade Tennant LLP |
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Salisbury Square House
8 Salisbury Square London EC4Y 8AP London EC4Y 8AP (GB) |
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(54) |
ION MILLING APPARATUS AND SAMPLE HOLDER |
(57) There is provided an ion milling apparatus capable of reliably supporting a part
of a sample to be milled and of suppressing material sputtered off by ion beam irradiation
from remaining on the sample. The ion milling apparatus (10) has: a sample holder
(27) including a shield member (29) for shielding the sample (11) except for a portion
to be milled (11b); and a sample locking member (31) cooperating with the shield member
(29) such that the sample (11) is sandwiched and held therebetween (31, 29). The shield
member (29) has an edge portion (29a) that determines a milling position on or in
the sample (11). The sample locking member (31) is disposed downstream of the edge
portion (29a) in the direction of irradiation by the ion beam (12) and has a support
portion (33) cooperating with the edge portion (29a) to support the milled portion
(11b) therebetween (29a, 33). The support portion (33) has a first surface (34) making
contact with the sample (11) and a second surface (35) making a given angle (θ) to
the first surface (34). The given angle (θ) is equal to or less than 90°.