(19)

(11)

EP 3 966 634 A1

(12)

(43) Date of publication: 16.03.2022 Bulletin 2022/11 (21) Application number: 20723418.8 (22) Date of filing: 07.05.2020

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) H01L 21/683(2006.01) (52) Cooperative Patent Classification (CPC): G03F 7/70033; G03F 7/70708; G03F 7/70941; H01L 21/6833 (86) International application number: PCT/EP2020/062732 (87) International publication number: WO 2020/229302 (19.11.2020 Gazette 2020/47)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 10.05.2019 EP 19173683 06.06.2019 EP 19178628 15.07.2019 EP 19186258 (71) Applicant: ASML Netherlands B.V. 5500 AH Veldhoven (NL)	(72) Inventors: YAKUNIN, Andrei, Mikhailovich 5500 AH Veldhoven (NL) VAN DER WILK, Ronald 5500 AH Veldhoven (NL) VAN KAMPEN, Maarten 5500 AH Veldhoven (NL) VAN DE KERKHOF, Marcus, Adrianus 5500 AH Veldhoven (NL) LASSISE, Adam 5500 AH Veldhoven (NL) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)