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EP 3 969 642 A1

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(43) Date of publication: 23.03.2022 Bulletin 2022/12 (21) Application number: 20804988.2 (22) Date of filing: 13.05.2020

(51) International Patent Classification (IPC):  C30B 19/04(2006.01) C30B 29/40(2006.01) C30B 19/12(2006.01) (52) Cooperative Patent Classification (CPC): C30B 29/40; C30B 25/00; C30B 25/02; H01L 21/02546; H01L 21/0262; H01L 21/02395; H01L 21/02463; H01L 21/0254; H01L 21/02543; H01L 21/02505; H01L 21/02576; H01L 21/02579 (86) International application number: PCT/US2020/032676 (87) International publication number: WO 2020/232123 (19.11.2020 Gazette 2020/47)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 14.05.2019 US 201916412328 (71) Applicant: Utica Leaseco, LLC Rochester Hills, MI 48307 (US)

(72) Inventors: JAIN, Nikhil Sunnyvale, California 94085 (US) JEWELL, Jason M. Sunnyvale, California 94085 (US) WANG, Chaowei Sunnyvale, California 94085 (US) WU, Ji Sunnyvale, California 94085 (US) PERL, Emmett Edward Sunnyvale, California 94085 (US) CANIZARES, Claudio Andres Sunnyvale, California 94085 (US) ZHANG, Ling Sunnyvale, California 94085 (US) KAYES, Brendan M. Sunnyvale, California 94085 (US) (74) Representative: Abthorpe, Mark  Kilburn & Strode LLP Lacon London 84 Theobalds Road London WC1X 8NL London WC1X 8NL (GB)