(19)
(11) EP 3 976 973 A1

(12)

(43) Date of publication:
06.04.2022 Bulletin 2022/14

(21) Application number: 20730223.3

(22) Date of filing: 29.05.2020
(51) International Patent Classification (IPC): 
F04D 19/04(2006.01)
F04B 37/02(2006.01)
(52) Cooperative Patent Classification (CPC):
F04D 19/042; F04D 19/046; F04B 37/02
(86) International application number:
PCT/EP2020/064964
(87) International publication number:
WO 2020/239975 (03.12.2020 Gazette 2020/49)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 29.05.2019 GB 201907557
20.02.2020 GB 202002394

(71) Applicant: Edwards Limited
Burgess Hill, Sussex RH15 9TW (GB)

(72) Inventors:
  • CHEW, Andrew David
    Burgess Hill Sussex RH15 9TW (GB)
  • LAMB, Peter Charles
    Burgess Hill Sussex RH15 9TW (GB)

(74) Representative: Totman, Clare Elizabeth 
Edwards Limited Innovation Drive
Burgess Hill, West Sussex RH15 9TW
Burgess Hill, West Sussex RH15 9TW (GB)

   


(54) A TURBOMOLECULAR PUMP, A VACUUM PUMPING SYSTEM AND A METHOD OF EVACUATING A VACUUM CHAMBER