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(11)

EP 3 977 529 A1

(12)

(43) Date of publication: 06.04.2022 Bulletin 2022/14 (21) Application number: 20814928.6 (22) Date of filing: 28.05.2020

(51) International Patent Classification (IPC):  H01L 51/00(2006.01) C07F 7/24(2006.01) H01L 51/42(2006.01) C07F 13/00(2006.01) (52) Cooperative Patent Classification (CPC): Y02E 10/549; H01L 51/42; C07F 7/24; H01L 51/0007; H01L 51/0027 (86) International application number: PCT/US2020/034901 (87) International publication number: WO 2020/243287 (03.12.2020 Gazette 2020/49)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 30.05.2019 US 201916426191 30.05.2019 US 201916426341 30.05.2019 US 201916426439 (71) Applicant: Energy Materials Corporation Rochester, New York 14650 (US)	(72) Inventors: CHRISTENSEN, Scott Kenneth Southampton Sq. North Chili, New York 14514 (US) LI, Qi Rochester, New York 14612 (US) TOMBS, Thomas Nathaniel Rochester, New York 14610 (US) DELUCA, Stephan J. Meadville, Pennsylvania 16335 (US) (74) Representative: Flügel Preissner Schober Seidel  Patentanwälte PartG mbB Nymphenburger Straße 20 80335 München 80335 München (DE)