(19)
(11) EP 3 984 060 A1

(12)

(43) Date of publication:
20.04.2022 Bulletin 2022/16

(21) Application number: 20822619.1

(22) Date of filing: 11.06.2020
(51) International Patent Classification (IPC): 
H01L 21/67(2006.01)
H01L 23/00(2006.01)
H01L 21/683(2006.01)
H01L 21/68(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 21/681; H01L 21/67132; H01L 21/67144; H01L 21/6835; H01L 2221/68318; H01L 2221/68363
(86) International application number:
PCT/US2020/037230
(87) International publication number:
WO 2020/252164 (17.12.2020 Gazette 2020/51)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 11.06.2019 US 201962859830 P

(71) Applicant: Kulicke & Soffa Netherlands B.V.
5626 DC Eindhoven (NL)

(72) Inventors:
  • SEMLER, Matthew R.
    Fargo, North Dakota 58102 (US)
  • BROWN, Samuel
    Cambridge MA 02138 (US)
  • HOEFS, Rudolphus Hendrikus
    5629NT Eindhoven (NL)

(74) Representative: Fish & Richardson P.C. 
Highlight Business Towers Mies-van-der-Rohe-Straße 8
80807 München
80807 München (DE)

   


(54) POSITIONAL ERROR COMPENSATION IN ASSEMBLY OF DISCRETE COMPONENTS BY ADJUSTMENT OF OPTICAL SYSTEM CHARACTERISTICS