(19)
(11) EP 3 994 452 A1

(12)

(43) Date of publication:
11.05.2022 Bulletin 2022/19

(21) Application number: 20776220.4

(22) Date of filing: 30.06.2020
(51) International Patent Classification (IPC): 
G01N 21/67(2006.01)
G01N 15/02(2006.01)
H01J 37/32(2006.01)
G01N 21/84(2006.01)
B22F 1/00(2022.01)
G06F 11/07(2006.01)
B22F 9/14(2006.01)
(52) Cooperative Patent Classification (CPC):
G01N 21/67; G01N 2021/8411; H01J 37/32972; H01J 37/32055; H05H 1/52; H05H 1/0037; B22F 2999/00; B22F 9/12; B22F 1/054
 
C-Sets:
B22F 2999/00;
(86) International application number:
PCT/HU2020/050027
(87) International publication number:
WO 2021/005387 (14.01.2021 Gazette 2021/02)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 05.07.2019 HU 1900246

(71) Applicant: Szegedi Tudományegyetem
6720 Szeged (HU)

(72) Inventors:
  • GALBÁCS, Gábor
    6725 Szeged (HU)
  • GERETOVSZKY, Zsolt
    6725 Szeged (HU)
  • KOHUT, Attila
    6726 Szeged (HU)

(74) Representative: Horváth, Bertalan 
Gödölle, Kékes, Mészáros & Szabó Patent and Trademark Attorneys Keleti Károly u. 13/b
1024 Budapest
1024 Budapest (HU)

   


(54) METHOD AND APPARATUS FOR MONITORING A SPARK DISCHARGE PARTICLE GENERATOR