(19)
(11) EP 4 009 347 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
03.05.2023 Bulletin 2023/18

(43) Date of publication A2:
08.06.2022 Bulletin 2022/23

(21) Application number: 22151911.9

(22) Date of filing: 02.09.2020
(51) International Patent Classification (IPC): 
H01J 37/20(2006.01)
G01N 23/04(2018.01)
G01N 23/2251(2018.01)
 G01N 1/42(2006.01)
G01N 23/2204(2018.01)
(52) Cooperative Patent Classification (CPC):
H01J 2237/2004; H01J 37/20; G01N 1/42; G01N 23/2202; G01N 2223/418; G01N 2223/307
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 09.09.2019 US 201916565058

(62) Application number of the earlier application in accordance with Art. 76 EPC:
20194019.4 / 3790036

(71) Applicant: FEI Company
Hillsboro, OR 97124-5793 (US)

(72) Inventors:
  • HENDRIKSEN, Bas
    5602 BS Eindhoven (NL)
  • KUIJPER, Maarten
    5602 BS Eindhoven (NL)
  • MELE, Luigi
    5602 BS Eindhoven (NL)
  • DONA, Pleun
    5602 BS Eindhoven (NL)
  • RAJA, Erum
    5602 BS Eindhoven (NL)
  • AMINIAN, Atieh
    5602 BS Eindhoven (NL)

(74) Representative: Janssen, Francis-Paul 
FEI Company Patent Department P.O.Box 1745
5602 BS Eindhoven
5602 BS Eindhoven (NL)

   


(54) METHODS AND DEVICES FOR PREPARING SAMPLE FOR CRYOGENIC ELECTRON MICROSCOPY


(57) Various methods and devices are provided for searching the optimum sample condition of a sample for cryogenic electron microscopy. Multiple samples with different sample conditions may be screened using a sample inspection device 300. The sample inspection device includes at a first chamber 331 and a second chamber 332 formed between a top electron transparent layer 317 and a bottom electron transparent layer 318 for holding a first sample and a second sample, respectively. Multiple pillars 312 are formed within the first chamber, each pillar of the multiple pillars extending from the top electron transparent layer to the bottom electron transparent layer. A window 301 is formed with a portion of at least one of the top electron transparent layer and the bottom electron transparent layer for inspecting the samples, the window covering at least one of the multiple pillars.










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