(19)
(11) EP 4 010 920 A1

(12)

(43) Date of publication:
15.06.2022 Bulletin 2022/24

(21) Application number: 19759458.3

(22) Date of filing: 06.08.2019
(51) International Patent Classification (IPC): 
H01L 23/31(2006.01)
H01L 29/778(2006.01)
 H01L 29/20(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 29/778; H01L 29/2003; H01L 23/3171; H01L 23/291
(86) International application number:
PCT/US2019/045297
(87) International publication number:
WO 2021/025688 (11.02.2021 Gazette 2021/06)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(71) Applicant: IQE plc
Cardiff CF3 0LW (GB)

(72) Inventors:
  • LABOUTIN, Oleg
    South Easton, MA 02375 (US)
  • GAO, Xiang
    East Brunswick, NJ 08816 (US)
  • MARCHAND, Hugues
    Somerville, MA 02143 (US)

   


(54) DIELECTRIC PASSIVATION FOR LAYERED III-NITRIDE STRUCTURES