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(11)

EP 4 010 925 A1

(12)

(43) Date of publication: 15.06.2022 Bulletin 2022/24 (21) Application number: 20757419.5 (22) Date of filing: 07.08.2020

(51) International Patent Classification (IPC):  H01L 29/66(2006.01) H01L 29/165(2006.01) H01L 29/15(2006.01) H01L 29/12(2006.01) H01L 29/76(2006.01) H01L 29/423(2006.01) B82Y 10/00(2011.01) B82Y 15/00(2011.01) G06N 10/00(2022.01) H01L 29/205(2006.01) (52) Cooperative Patent Classification (CPC): B82Y 10/00; H01L 29/66977; H01L 29/42312; H01L 29/4238; H01L 29/7613; H01L 29/165; H01L 29/158; H01L 29/127; H01L 29/205; H01L 29/7782 (86) International application number: PCT/NL2020/050501 (87) International publication number: WO 2021/025558 (11.02.2021 Gazette 2021/06)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 07.08.2019 EP 19190531 (71) Applicant: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO 2595 DA 's-Gravenhage (NL)	(72) Inventors: EENDEBAK, Pieter Thijs 2595 DA 's-Gravenhage (NL) SAMKHARADZE, Nodar 2595 DA 's-Gravenhage (NL) (74) Representative: V.O.  P.O. Box 87930 2508 DH Den Haag 2508 DH Den Haag (NL)