(19)
(11) EP 4 022 669 A1

(12)

(43) Date of publication:
06.07.2022 Bulletin 2022/27

(21) Application number: 20856886.5

(22) Date of filing: 27.08.2020
(51) International Patent Classification (IPC): 
H01J 49/44(2006.01)
H01J 37/05(2006.01)
H01J 49/28(2006.01)
H01J 49/48(2006.01)
 G01N 23/227(2018.01)
H01J 49/00(2006.01)
H01J 49/46(2006.01)
(52) Cooperative Patent Classification (CPC):
G01N 23/227; H01J 49/48
(86) International application number:
PCT/SE2020/050824
(87) International publication number:
WO 2021/040609 (04.03.2021 Gazette 2021/09)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 30.08.2019 SE 1900143
24.09.2019 SE 1951077

(71) Applicant: Scienta Omicron AB
750 15 Uppsala (SE)

(72) Inventor:
  • OLOFSSON, Mikael
    753 29 Uppsala (SE)

(74) Representative: Zacco Sweden AB 
P.O. Box 5581 Löjtnantsgatan 21
114 85 Stockholm
114 85 Stockholm (SE)

   


(54) ELECTROSTATIC LENS FOR CONTROLLING BEAM OF ELECTRONS