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(11)

EP 4 048 746 A1

(12)

(43) Date of publication: 31.08.2022 Bulletin 2022/35 (21) Application number: 20878566.7 (22) Date of filing: 21.10.2020

(51) International Patent Classification (IPC):  C09G 1/02(2006.01) H01L 21/306(2006.01) C09K 3/14(2006.01) B24B 37/04(2012.01) (52) Cooperative Patent Classification (CPC): C09G 1/02; H01L 21/31053; C09K 3/1445 (86) International application number: PCT/US2020/056677 (87) International publication number: WO 2021/081102 (29.04.2021 Gazette 2021/17)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 24.10.2019 US 201962925378 P 13.10.2020 TW 109135360 (71) Applicant: Versum Materials US, LLC Tempe, AZ 85284 (US)	(72) Inventors: ROSE, Joseph D. Tempe, Arizona 85284 (US) ZHOU, Hongjun Tempe, Arizona 85284 (US) SHI, Xiaobo Tempe, Arizona 85284 (US) MURELLA, Krishna P. Tempe, Arizona 85284 (US) (74) Representative: Beck Greener LLP  Fulwood House 12 Fulwood Place London WC1V 6HR London WC1V 6HR (GB)