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(11)

EP 4 048 750 A1

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(43) Date of publication: 31.08.2022 Bulletin 2022/35 (21) Application number: 20879343.0 (22) Date of filing: 22.10.2020

(51) International Patent Classification (IPC):  C09G 1/02(2006.01) B24B 37/04(2012.01) C09K 3/14(2006.01) H01L 21/306(2006.01) (52) Cooperative Patent Classification (CPC): B24B 37/044; C09G 1/02; C09K 3/1409; C09K 3/1436 (86) International application number: PCT/US2020/056788 (87) International publication number: WO 2021/081162 (29.04.2021 Gazette 2021/17)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 22.10.2019 US 201962924332 P (71) Applicant: CMC Materials, Inc. Aurora, IL 60504 (US)	(72) Inventors: KRAFT, Steven Aurora, Illinois 60504 (US) HUNG LOW, Fernando Aurora, Illinois 60504 (US) PALLIKKARA KUTTIATOOR, Sudeep Aurora, Illinois 60504 (US) BROSNAN, Sarah Aurora, Illinois 60504 (US) REISS, Brian Aurora, Illinois 60504 (US) NAIK, Sajo Aurora, Illinois 60504 (US) (74) Representative: Barker Brettell LLP  100 Hagley Road Edgbaston Birmingham B16 8QQ Birmingham B16 8QQ (GB)