(19)
(11) EP 4 059 047 A1

(12)

(43) Date of publication:
21.09.2022 Bulletin 2022/38

(21) Application number: 20887509.6

(22) Date of filing: 02.11.2020
(51) International Patent Classification (IPC): 
H01L 21/67(2006.01)
H01L 21/00(2006.01)
 H01L 21/02(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 21/67051; H01L 21/67253; H01L 24/00; H01L 21/32134; H01L 22/26
(86) International application number:
PCT/US2020/058479
(87) International publication number:
WO 2021/096712 (20.05.2021 Gazette 2021/20)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 15.11.2019 US 201916685640

(71) Applicant: Veeco Instruments Inc.
Plainview, NY 11803 (US)

(72) Inventors:
  • TADDEI, John
    Plainview, New York 11803 (US)
  • GOLDBERG, David A.
    Plainview, New York 11803 (US)
  • LAWRENCE, Elena
    Plainview, New York 11803 (US)
  • COCHRAN, Ian
    Plainview, New York 11803 (US)
  • ORLANDO, Christopher
    Plainview, New York 11803 (US)
  • SWALLOW, James
    Plainview, New York 11803 (US)
  • BREINGAN, William Gilbert
    Media, Pennsylvania 19063 (US)

(74) Representative: Studio Torta S.p.A. 
Via Viotti, 9
10121 Torino
10121 Torino (IT)

   


(54) AN APPARATUS AND METHOD FOR THE MINIMIZATION OF UNDERCUT DURING A UBM ETCH PROCESS