(19)

(11)

EP 4 066 286 A1

(12)

(43) Date of publication: 05.10.2022 Bulletin 2022/40 (21) Application number: 20793891.1 (22) Date of filing: 01.10.2020

(51) International Patent Classification (IPC):  H01L 39/22(2006.01) H01L 39/24(2006.01) F25B 21/00(2006.01) (52) Cooperative Patent Classification (CPC): H01L 39/22; H01L 39/24; F25B 21/00; Y02B 30/00 (86) International application number: PCT/US2020/053789 (87) International publication number: WO 2021/108032 (03.06.2021 Gazette 2021/22)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 26.11.2019 US 201916696372 (71) Applicant: Northrop Grumman Systems Corporation Falls Church, VA 22042-4511 (US)	(72) Inventors: HATHAWAY, Aaron Ashley Baltimore, Maryland 21230 (US) PRZYBYSZ, John X. Severna Park, Maryland 21146 (US) YOUNG, Robert Miles Ellicott City, Maryland 21042 (US) ENGBRECHT, Edward R. Odenton, Maryland 21113 (US) (74) Representative: Marks & Clerk LLP  15 Fetter Lane London EC4A 1BW London EC4A 1BW (GB)