(19)
(11) EP 4 067 658 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
02.11.2022 Bulletin 2022/44

(43) Date of publication A2:
05.10.2022 Bulletin 2022/40

(21) Application number: 22164110.3

(22) Date of filing: 24.03.2022
(51) International Patent Classification (IPC): 
F04C 18/08(2006.01)
F04C 25/02(2006.01)
F04C 18/16(2006.01)
 F04C 18/12(2006.01)
F04C 29/04(2006.01)
(52) Cooperative Patent Classification (CPC):
F04C 18/084; F04C 18/126; F04C 25/02; F04C 29/04; F04C 18/16
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 29.03.2021 JP 2021054585

(71) Applicant: Ebara Corporation
Tokyo 144-8510 (JP)

(72) Inventors:
  • ZHANG, Wei
    Tokyo, 144-8510 (JP)
  • ITO, Kazuma
    Tokyo, 144-8510 (JP)
  • KIMOTO, Kazuki
    Tokyo, 144-8510 (JP)
  • ARAI, Hideo
    Tokyo, 144-8510 (JP)
  • TANAKA, Takahiro
    Tokyo, 144-8510 (JP)

(74) Representative: Carstens, Dirk Wilhelm 
Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstraße 5
80538 München
80538 München (DE)

   


(54) VACUUM PUMP APPARATUS


(57) A vacuum pump apparatus capable of preventing a decrease in temperature of a pump casing due to heat transfer, and capable of maintaining a high temperature in a rotor chamber is disclosed. A side cover is provided between a pump casing and a motor housing. The side cover includes an inner wall portion forming an end surface of the rotor chamber, an outer wall portion located outwardly of the inner wall portion, and a narrow portion located between the inner wall portion and the outer wall portion. The inner wall portion, the outer wall portion, and the narrow portion are an integrally-formed structure, and the narrow portion has a cross-sectional area smaller than cross-sectional areas of the inner wall portion and the outer wall portion.







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Search report