(19)

(11)

EP 4 077 775 A1

(12)

(43) Date of publication: 26.10.2022 Bulletin 2022/43 (21) Application number: 20839240.7 (22) Date of filing: 15.12.2020

(51) International Patent Classification (IPC):  C30B 25/18(2006.01) C30B 29/04(2006.01) C30B 25/20(2006.01) C23C 16/27(2006.01) (52) Cooperative Patent Classification (CPC): C30B 29/04; C30B 25/205; C30B 25/18; C23C 16/27 (86) International application number: PCT/EP2020/086311 (87) International publication number: WO 2021/122662 (24.06.2021 Gazette 2021/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 19.12.2019 GB 201918883 (71) Applicant: Element Six Technologies Limited Didcot, Oxfordshire OX11 0QR (GB)	(72) Inventors: WILLIAMS, Gruffudd Oxford Didcot Oxfordshire OX11 0QR (GB) WORT, Christopher Didcot Oxfordshire OX11 0QR (GB) (74) Representative: Mitchell, Matthew Benedict David  Element Six (UK) Limited Group Intellectual Property Global Innovation Centre Harwell Oxford Didcot, Oxfordshire OX11 0QR Didcot, Oxfordshire OX11 0QR (GB)