(19)
(11) EP 4 078 191 A1

(12)

(43) Date of publication:
26.10.2022 Bulletin 2022/43

(21) Application number: 20828160.0

(22) Date of filing: 15.12.2020
(51) International Patent Classification (IPC): 
G01Q 60/32(2010.01)
G01Q 70/06(2010.01)
 G01N 29/06(2006.01)
(52) Cooperative Patent Classification (CPC):
G01Q 60/32; G01Q 70/06; G01N 29/0681; G01N 2291/0427
(86) International application number:
PCT/NL2020/050787
(87) International publication number:
WO 2021/125944 (24.06.2021 Gazette 2021/25)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 16.12.2019 NL 2024470

(71) Applicant: Nearfield Instruments B.V.
3047 AT Rotterdam (NL)

(72) Inventor:
  • ZABBAL, Paul
    3047 AT Rotterdam (NL)

(74) Representative: V.O. 
P.O. Box 87930
2508 DH Den Haag
2508 DH Den Haag (NL)

   


(54) A METHOD AND SYSTEM FOR PERFORMING CHARACTERIZATION MEASUREMENTS ON AN ELONGATED SUBSTRATE