(19)
(11) EP 4 081 671 A1

(12)

(43) Date of publication:
02.11.2022 Bulletin 2022/44

(21) Application number: 20964203.2

(22) Date of filing: 03.12.2020
(51) International Patent Classification (IPC): 
C23C 14/54(2006.01)
 H01J 37/32(2006.01)
(52) Cooperative Patent Classification (CPC):
C23C 14/3442; C23C 14/544; H01J 37/32935; H01J 37/32917; H01J 37/3417; H01J 37/34; H01J 37/32779; H01J 37/08
(86) International application number:
PCT/CZ2020/000053
(87) International publication number:
WO 2022/117130 (09.06.2022 Gazette 2022/23)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(71) Applicant: Univerzita Palackého v Olomouci
771 47 Olomouc (CZ)

(72) Inventors:
  • HUBICKA, Zdenek
    152 00 Praha 5 (CZ)
  • STRANÁK, Vítezslav
    370 05 eské Bud jovice (CZ)
  • CADA, Martin
    198 00 Praha 8 (CZ)
  • OLEJNÍCEK, JiRí
    143 00 Praha 4, Modrany (CZ)
  • HRABOVSKÝ, Miroslav
    779 00 Olomouc (CZ)
  • SCHOVÁNEK, Petr
    751 31 Lipník nad Becvou (CZ)

(74) Representative: Dadej, Leopold 
Na Valtické 339/6
691 41 Breclav 4
691 41 Breclav 4 (CZ)

   


(54) DEVICE FOR DEPOSITION OF DIELECTRIC OPTICAL THIN FILMS BY THE HELP OF SPUTTERING PLASMA SOURCES AND SOURCES OF ENERGY IONS