(19)
(11) EP 4 081 674 A1

(12)

(43) Date of publication:
02.11.2022 Bulletin 2022/44

(21) Application number: 20845252.4

(22) Date of filing: 17.12.2020
(51) International Patent Classification (IPC): 
C30B 29/36(2006.01)
C30B 33/04(2006.01)
C30B 33/00(2006.01)
(52) Cooperative Patent Classification (CPC):
C30B 29/36; C30B 33/04; C30B 33/00
(86) International application number:
PCT/US2020/065520
(87) International publication number:
WO 2021/133626 (01.07.2021 Gazette 2021/26)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 27.12.2019 US 201962954082 P

(71) Applicant: Wolfspeed, Inc.
Durham, NC 27703 (US)

(72) Inventors:
  • KHLEBNIKOV, Yuri
    Raleigh, North Carolina 27617 (US)
  • SAKHALKAR, Varad R.
    Morrisville, North Carolina 27560 (US)
  • KENT, Caleb A.
    Durham, North Carolina 27713 (US)
  • TSVETKOV, Valeri F.
    Durham, North Carolina 27705 (US)
  • PAISLEY, Michael J.
    Raleigh, North Carolina 27603 (US)
  • KRAMARENKO, Oleksandr
    Durham, North Carolina 27701 (US)
  • CONRAD, Matthew David
    Durham, North Carolina 27713 (US)
  • DEYNEKA, Eugene
    Raleigh, North Carolina 27607 (US)
  • GRIFFITHS, Steven
    Morrisville, North Carolina 27560 (US)
  • BUBEL, Simon
    Carrboro, North Carolina 27510 (US)
  • POWELL, Adrian R.
    Cary, North Carolina 27519 (US)
  • LEONARD, Robert Tyler
    Raleigh, North Carolina 27606 (US)
  • BALKAS, Elif
    Cary, North Carolina 27511 (US)
  • SEAMAN, Jeffrey C.
    Louisburg, North Carolina 27549 (US)

(74) Representative: Murgitroyd & Company 
Murgitroyd House 165-169 Scotland Street
Glasgow G5 8PL
Glasgow G5 8PL (GB)

   


(54) LARGE DIAMETER SILICON CARBIDE WAFERS