(19)
(11) EP 4 088 302 A1

(12)

(43) Date of publication:
16.11.2022 Bulletin 2022/46

(21) Application number: 21738102.9

(22) Date of filing: 09.01.2021
(51) International Patent Classification (IPC): 
H01J 37/32(2006.01)
H01L 21/67(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 37/32715; H01J 37/32082; H01J 37/3299
(86) International application number:
PCT/US2021/012848
(87) International publication number:
WO 2021/142379 (15.07.2021 Gazette 2021/28)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 10.01.2020 US 202062959623 P
08.01.2021 US 202117145247

(71) Applicant: Comet Technologies USA, Inc
San Jose, California 95131 (US)

(72) Inventors:
  • SAVAS, Stephen E.
    San Jose, California 95131 (US)
  • DE CHAMBRIER, Alexandre
    San Jose, California 95131 (US)

(74) Representative: Impact Intellectual Property LLP 
1 Sans Walk
London EC1R 0LT
London EC1R 0LT (GB)

   


(54) AZIMUTHAL SENSOR ARRAY FOR RADIO FREQUENCY PLASMA-BASED WAFER PROCESSING SYSTEMS